Masking material for TMAH etching

Donguk Nam dwnam at stanford.edu
Mon Mar 7 09:11:23 PST 2011


Hi all,

does anyone know of any material besides silicon oxide and nitride that can
withstand 6-7 hours of TMAH etching?
I need to protect the front side during etching silicon from the back side.
And front side has LTO patterns, so covering with oxide and nitride would
ruin my pattern.

Please let me know if you have any idea.

Thanks,
Donguk
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