Nickel etching.

dton at snf.stanford.edu dton at snf.stanford.edu
Wed Mar 16 14:29:40 PDT 2011


Hi y'all
Have anyone done any Nickel etching at SNF?   Dry etching would
be prefered but I am not sure if any tool at SNF can do this w/out
contamination the etcher.  Wet etching normally have HNO3 and I 
am not sure how well the photoresist can handle the etchant.

If you did this before, please drop me a hint.

Thanks,
Dinh Ton



More information about the labmembers mailing list