EE412 project opportunity: Intlvac PVD system

Roger T. Howe rthowe at
Tue Mar 22 07:53:49 PDT 2011


With the Intlvac sputtering system up for a week now, there's an 
opportunity to work on a 412 project with Ed Myers to define a baseline 
process for a metal deposition (e.g., rate, uniformity, ...).   Enroll 

Anyone who has a project that might add to the SNF's capabilities should 
email Olav Solgaard and me and see if it will work for EE412.


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