Chlorine Etch Gas Fault, 3/27/11

[Ed Myers]

All,

The senor monitoring the gas cabinet for the chlorine etch gas went 
in to fault this morning.  This type of event automatically shutdown 
the gas cabinet, preventing any gas flow.  I did not see any obvious 
leak during my inspection of the cabinet.

I am leaving the cabinet shutdown, so no chlorine gas will be 
available for the etch tools, such as PQuest, Lampoly and the 
P5000.  I placed a note on the door to the fab entrance, trying to 
inform anyone planning on using the etch tools.

Regards,
SNF Staff