Help in using MRC

Xi Xie xixie54 at
Tue Mar 29 17:01:28 PDT 2011

Hello everyone,
I am going to use MRC (dry etching) tomorrow afternoon at 1:30pm. However, this is my first time to use Mrc and I am not confident to use it although I have got trained on that before. Are there anyones know how to use Mrc and can do me a favor to watch me using Mrc tomorrow at 1:30pm? Thanks!
Xi Xie
Department of Material Science and Engineering
Stanford University

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