Dummy HSQ-patterned samples

Robert Chen robert.chen at stanford.edu
Sun Nov 6 13:20:40 PST 2011


Hi SNF users,

I'm wondering if anyone has any samples patterned with ebeam using
negative-resist HSQ. I'm not sure what thicknesses are common, but greater
than 300nm is desired. Samples will be etched.

Thanks,

Robert Chen
Electrical Engineering Ph.D. Candidate
Harris MBE Group, Stanford University
http://robochen.web.stanford.edu
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