Dummy HSQ-patterned samples
robert.chen at stanford.edu
Sun Nov 6 13:20:40 PST 2011
Hi SNF users,
I'm wondering if anyone has any samples patterned with ebeam using
negative-resist HSQ. I'm not sure what thicknesses are common, but greater
than 300nm is desired. Samples will be etched.
Electrical Engineering Ph.D. Candidate
Harris MBE Group, Stanford University
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the labmembers