Dummy HSQ-patterned samples

Robert Chen robert.chen at stanford.edu
Sun Nov 6 13:20:40 PST 2011

Hi SNF users,

I'm wondering if anyone has any samples patterned with ebeam using
negative-resist HSQ. I'm not sure what thicknesses are common, but greater
than 300nm is desired. Samples will be etched.


Robert Chen
Electrical Engineering Ph.D. Candidate
Harris MBE Group, Stanford University
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