Litho Back on at 2 pm

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Nov 10 13:41:30 PST 2011


Hello all,

There was report of an odor in the litho area around 12:50.
After evacuating the litho  area, Mary, Maurice and i  realized that is 
Electrical and the source seems to be coming from ASML.

We have powered down the ASML  and Linda has called  FSE for help.

Litho will be open at 2 pm  and we will update you as what the status of 
the ASML will be.


mahnaz



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