Litho Back on at 2 pm
mahnaz at stanford.edu
Thu Nov 10 13:41:30 PST 2011
There was report of an odor in the litho area around 12:50.
After evacuating the litho area, Mary, Maurice and i realized that is
Electrical and the source seems to be coming from ASML.
We have powered down the ASML and Linda has called FSE for help.
Litho will be open at 2 pm and we will update you as what the status of
the ASML will be.
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