Wet etching TiW?

Suyog Gupta suyog at stanford.edu
Tue Oct 4 05:35:58 PDT 2011

Dear Labmembers,

I was wondering if anybody has tried wet etching TiW? I have about 100nm of
TiW on Al2O3 that I need to wet etch.
H2O2 seems to work but the etch rate at room temperature turned out to be
too slow ~ 3 nm/min. If you have any suggestions, please let me know!

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