Wet etching TiW?

ToeCutter toecutter4ranger at gmail.com
Fri Oct 7 15:20:00 PDT 2011

I used to etch off pallets coated with TiW and Au with heated H2O2 at  
40 degrees C followed by Au Anodic etch.
This was on a SLOAN sputter tool.


On Oct 4, 2011, at 5:35 AM, Suyog Gupta <suyog at stanford.edu> wrote:

> Dear Labmembers,
> I was wondering if anybody has tried wet etching TiW? I have about  
> 100nm of TiW on Al2O3 that I need to wet etch.
> H2O2 seems to work but the etch rate at room temperature turned out  
> to be too slow ~ 3 nm/min. If you have any suggestions, please let  
> me know!
> Thanks,
> Suyog

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