Etching Away HSQ

Robert Chen robert.chen at stanford.edu
Sun Oct 9 18:43:06 PDT 2011


Hi Labmembers,

Does anyone have experience etching away HSQ masks patterned using e-beam?
Looking for recipes, etch rates, and general considerations.

Thanks,

Robert Chen
Electrical Engineering Ph.D. Candidate
Harris MBE Group, Stanford University
http://robochen.web.stanford.edu
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