STS Dep and Epi shutdown Wed. Oct. 19 for gas tie ins

Ted Berg tberg at stanford.edu
Fri Oct 14 11:03:07 PDT 2011


Hello All,
     STSdep and Epi will be shut down on Wed. Oct 19 for gas line tie 
ins for the new CCP and ICP tools. Hopefully back up by the afternoon. Ted



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