Individual Tool Shutdowns over the next two weeks

Mary Tang mtang at
Fri Oct 21 16:08:51 PDT 2011

Dear labmembers --

Pre-renovation construction begins Monday.  One project will involve 
shutting down the process cooling water in different fingerwalls 
throughout the lab.  Individual tools have been reserved according to 
the project schedule; we'll do our best to keep everyone informed of 
changes.  The schedule for shutdown is as follows:

Monday, 10/24 - tylans1-4, fga2 bank
Tuesday, 10/25 - tylannitride, tylanbpsg, tylansige, teos2, tylanpoly, 
thermcolto, thermcopoly1/2, thermconitride1, thermco1/2
Wed. 10/26 - drytek2, pquest, amtetcher
Thur, 10/27 - lampoly, intlvac_evap, intlvac_sputter, tel
Fri, 10/28 - stsetch, drytek4, mrc
Mon, 10/31 - gryphon, innotec, p5000etch
Tue, 11/1 - stsetch2, matrix, metalica, sts dep, savannah, fiji-l/r
Thur, 11/3 - asml

The contractors will begin work on the cooling water lines at 7 am and 
expect to end by 3 pm each day.  Staff may need to shutdown tools 
earlier to prepare for the work and may need extra time to bring them 
back up afterward, depending on the individual tool.  Updates for 
individual tools will be posted on Coral.

Thanks for your patience -- after two years of planning, renovation 
construction begins!!

Your SNF staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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