Individual Tool Shutdowns over the next two weeks

Mary Tang mtang at stanford.edu
Mon Oct 24 21:09:37 PDT 2011


Hi all --

Just to clarify, as several people have asked:  the tool shutdowns 
described below are for ONE DAY only as indicated, for pre-renovation 
construction work on the water lines.

M

On 10/21/2011 4:08 PM, Mary Tang wrote:
> Dear labmembers --
>
> Pre-renovation construction begins Monday.  One project will involve 
> shutting down the process cooling water in different fingerwalls 
> throughout the lab.  Individual tools have been reserved according to 
> the project schedule; we'll do our best to keep everyone informed of 
> changes.  The schedule for shutdown is as follows:
>
> Monday, 10/24 - tylans1-4, fga2 bank
> Tuesday, 10/25 - tylannitride, tylanbpsg, tylansige, teos2, tylanpoly, 
> thermcolto, thermcopoly1/2, thermconitride1, thermco1/2
> Wed. 10/26 - drytek2, pquest, amtetcher
> Thur, 10/27 - lampoly, intlvac_evap, intlvac_sputter, tel
> Fri, 10/28 - stsetch, drytek4, mrc
> Mon, 10/31 - gryphon, innotec, p5000etch
> Tue, 11/1 - stsetch2, matrix, metalica, sts dep, savannah, fiji-l/r
> Thur, 11/3 - asml
>
> The contractors will begin work on the cooling water lines at 7 am and 
> expect to end by 3 pm each day.  Staff may need to shutdown tools 
> earlier to prepare for the work and may need extra time to bring them 
> back up afterward, depending on the individual tool.  Updates for 
> individual tools will be posted on Coral.
>
> Thanks for your patience -- after two years of planning, renovation 
> construction begins!!
>
> Your SNF staff
>
>




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