DRIE for small feature

Young Ik Sohn ysohn at stanford.edu
Thu Sep 8 16:45:36 PDT 2011


Hi all,

I wonder if there is who have an experience with DRIE for small features.

My target structure is a hole of 5um diameter, and I'd like to DRIE for around 100um while having as good vertical profile as possible.
Please contact me if anyone has a similar experience.

Thanks,
Young Ik Sohn



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