Ta wet etching

jim kruger jimkruger at yahoo.com
Tue Sep 27 09:51:26 PDT 2011

The Berkeley MEMS etch tables, available on the SNF website if you dig deep enough, list 50C H2O2 and Transcene NiCr etch, as well as harsher recipes, for Ta.  I think it should be easy to dry etch as well.  What are you stopping on?


From: Arunanshu Roy <amroy at stanford.edu>
To: labmembers at snf.stanford.edu
Sent: Monday, September 26, 2011 9:07 PM
Subject: Ta wet etching


I was wondering if anyone has experience with wet etching of thin Ta
films. I only need to etch 5 nm and I don't mind a slow etch rate.
Most references I found online recommend using a concentrated solution
of HF and HNO3 but I would prefer something milder, especially since I
am not looking for a high etch rate.

Thanks a lot,
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