making tiny through holes in glass substrate

Chienliu Chang clchang6 at
Fri Apr 6 00:01:25 PDT 2012

Dear Ben,
I know two solutions for your spec.
1. You can find "Photosensitive glass wafers" in HOYA. They also offer 
conductive feed-throughs if needed.
2. Electrochemical etch of Pyrex glass. (You can search the author 

Method 2 above is doable here.
Additionally, I also have tried femto-second laser, but it is not a cheap 
way. (You can search my paper.)
I think there are still a lot of methods.
Good luck.

Chienliu Chang, Ph.D.

Room 104
Ginzton Laboratory
Center for Nanoscale Science & Engineering
Stanford University
348 Via Pueblo, Stanford, CA 94305-4088

Phone: 650-725-2265
Email: clchang6 at
       clchang6 at
----- Original Message ----- 
From: "Ben Jian" <ben.jian at>
To: <labmembers at>
Sent: Thursday, April 05, 2012 9:24 PM
Subject: making tiny through holes in glass substrate

> Hi Labmembers,
> I am trying to find a cheap way to make some through holes in glass or 
> fused silica.  This is for a prototype device.  The holes are 135um +/- 
> 10um and can have loose tolerance.  The glass substrate thickness should 
> be at least 100um.  The hole profile is not very important.  We want to 
> make a small number of holes (say 4x4) with a pitch of 500um.  We have 
> looked into laser drilling but the price is too high for us ($3000).  It 
> seems that very small diameter diamond drills of this diameter exist but I 
> don't know who can provide this service, because air bearing drilling 
> machines are required.  Does anyone have a low cost solution?  Thank you.
> Ben 

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