making tiny through holes in glass substrate

Steve Kramer (sjkramer) sjkramer at
Fri Apr 6 07:44:49 PDT 2012

I have used Ceramic Tech in Freemont to have wafer pockets milled into quartz blank wafers.  They may be able to provide the hole drilling service, or suggest someone who can.  I'm quite surprised that the laser drilling company was so expensive.
e-mail:  kanu at

Please tell them Micron Technology sent you.


-----Original Message-----
From: Ben Jian [mailto:ben.jian at] 
Sent: Thursday, April 05, 2012 10:25 PM
To: labmembers at
Subject: making tiny through holes in glass substrate

Hi Labmembers,

I am trying to find a cheap way to make some through holes in glass or 
fused silica.  This is for a prototype device.  The holes are 135um +/- 
10um and can have loose tolerance.  The glass substrate thickness should 
be at least 100um.  The hole profile is not very important.  We want to 
make a small number of holes (say 4x4) with a pitch of 500um.  We have 
looked into laser drilling but the price is too high for us ($3000).  It 
seems that very small diameter diamond drills of this diameter exist but 
I don't know who can provide this service, because air bearing drilling 
machines are required.  Does anyone have a low cost solution?  Thank you.


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