making tiny through holes in glass substrate
Steve Kramer (sjkramer)
sjkramer at micron.com
Fri Apr 6 07:44:49 PDT 2012
I have used Ceramic Tech in Freemont to have wafer pockets milled into quartz blank wafers. They may be able to provide the hole drilling service, or suggest someone who can. I'm quite surprised that the laser drilling company was so expensive.
e-mail: kanu at ceramictechinc.com.
Please tell them Micron Technology sent you.
From: Ben Jian [mailto:ben.jian at arrayedfiberoptics.com]
Sent: Thursday, April 05, 2012 10:25 PM
To: labmembers at snf.stanford.edu
Subject: making tiny through holes in glass substrate
I am trying to find a cheap way to make some through holes in glass or
fused silica. This is for a prototype device. The holes are 135um +/-
10um and can have loose tolerance. The glass substrate thickness should
be at least 100um. The hole profile is not very important. We want to
make a small number of holes (say 4x4) with a pitch of 500um. We have
looked into laser drilling but the price is too high for us ($3000). It
seems that very small diameter diamond drills of this diameter exist but
I don't know who can provide this service, because air bearing drilling
machines are required. Does anyone have a low cost solution? Thank you.
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