Hf etch resist adhesion

Max Shulaker maxms at stanford.edu
Fri Apr 6 17:06:38 PDT 2012


Hello all,
I hope everyone had a good week.
I was wondering if anyone had a fix for poor resist adhesion during a
longer (15 minute) 6:1 BOE etch?  I notice all of my resist features peel
off after a few minutes.  My substrate, if you are curious, is hafnium
dioxide.
Thanks, and any help would be appreciated
Max
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