Hf etch resist adhesion

[Max Shulaker]

Hello all,
I hope everyone had a good week.
I was wondering if anyone had a fix for poor resist adhesion during a
longer (15 minute) 6:1 BOE etch?  I notice all of my resist features peel
off after a few minutes.  My substrate, if you are curious, is hafnium
dioxide.
Thanks, and any help would be appreciated
Max
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20120406/03e8a599/attachment.html>