Hf etch resist adhesion

Pradeep Nataraj pradeep.nataraj at gmail.com
Fri Apr 6 18:41:00 PDT 2012


Max,

Make sure you hard bake the resist for at least 30 min at 110C.
Try using PadEtch, which is very benign to resist. I do not know if it
etches HfOx, I never tried it before.
Pradeep

On Fri, Apr 6, 2012 at 5:06 PM, Max Shulaker <maxms at stanford.edu> wrote:

> Hello all,
> I hope everyone had a good week.
> I was wondering if anyone had a fix for poor resist adhesion during a
> longer (15 minute) 6:1 BOE etch?  I notice all of my resist features peel
> off after a few minutes.  My substrate, if you are curious, is hafnium
> dioxide.
> Thanks, and any help would be appreciated
> Max
>
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