Pyramid texture etching

Mark Dante mark.dante at
Fri Apr 13 07:46:04 PDT 2012

Does anyone have any experience doing a pyramid texture etch on Si
wafers? I'm having trouble getting separated, well defined pyramids.
Any input on concentrations and experimental set ups would be much
appreciated. Thanks so much.


Mark Dante
Scientist/Project Manager
ThinSilicon Corp.
1400 N Shoreline Blvd, Suite B-3
Mountain View, CA 94043
Office: 650-937-0004
Fax: 650-937-0005

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