induce random via hole on aluminum oxide

Xi Xie xixie54 at stanford.edu
Fri Aug 3 13:08:29 PDT 2012


Hi,
I have an 3-D aluminum oxide layer of 10nm thickness and want to induce random via hole (10nm-200nm) on it. Since the layer is 3-D, wet etch is preferred. Does anyone have experience in doing that? Thanks!

Best,
Xi



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