Fwd: TGO Testing Monday Aug. 6th

Ted Berg tberg at stanford.edu
Mon Aug 6 07:32:26 PDT 2012


Just a reminder for all. Thanks for your patience. Ted


-------- Original Message --------
Subject: 	TGO Testing Monday Aug. 6th
Date: 	Tue, 31 Jul 2012 09:49:27 -0700
From: 	Ed Myers <edmyers at stanford.edu>
To: 	labmembers at snf.stanford.edu
CC: 	Aaron McCarthy <amccarth at stanford.edu>



All,

We are tentatively scheduled for the County to come in Monday afternoon
(1pm-5pm) and test our Toxic Gas Monitoring changes associated with the
new etcher installation.  The county will want to see live gas
challenges, which will lead to shutdown of our hazardous gases.  This
will be very dissruptive since it will effect the gas supplies all the
etcher, epi, LPVCD, PECVD, etc.  Once I receive confirmation as to the
time of the visit, I will make blocking reservations on all the tools
which will be effected.

While I know how disruptive this is, it is also very good news for those
waiting for the new etcher to come on line.  We must pass this
inspection before we can turn on the process gases.  Once we can turn on
the process gases, the process engineers can come in and do the final
start-up and qualification on the four new etchers.

Regards,
The SNF Staff




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