Gases for CL96

Ted Berg tberg at stanford.edu
Fri Aug 10 09:45:13 PDT 2012


All gases related to CL96 have been turned off for the weekend. . Parts 
for repair should be here early Monday. Gases include: Arsine, B2H6, 
Phosphine, and Silane for Epi. Silane for Tylan and Thermco LTOs. Silane 
for STS. Silane for ICP and CCP.  So the tools that are down are : Epi, 
ICP, CCP Tylan and Thermco LPs , STS dep. Sorry for any inconvenience . Ted



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