Solution for Slow Etch Pit Density Studies in Ge

Robert Chen robertchen at snf.stanford.edu
Tue Aug 21 10:40:12 PDT 2012


Hi All,

I'm looking for an etchant for looking at etch pit density studies for
Germanium (001) epi (etching pits corresponding to threading dislocations).
There are a few recipes out there, but I believe they use some non-standard
and non-stocked chemicals in SNF. Does  anyone have a recipe (and the
chemicals) that is verified to work for this?

Thanks,

Robert Chen
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