No Steam ( Cogen)

Mahnaz Mansourpour mahnaz at stanford.edu
Tue Feb 28 10:31:18 PST 2012


Hello all,

We have been informed that Cogen ( steam ) is down.

You might start seeing shift in the focus with regard to the exposure time.
Critical work should wait   Non critical could continue, please do a 
test wafer.
we will update you as soon as we have more information.

mahnaz





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