From shott at stanford.edu Sun Jul 1 08:58:34 2012 From: shott at stanford.edu (John Shott) Date: Sun, 01 Jul 2012 08:58:34 -0700 Subject: Remot Coral fixes ... Part Deux Message-ID: <4FF073AA.20109@stanford.edu> SNF Lab Members: Several of you have indicated that the first purging of the application did not work for you. While I've not seen detailed logs from those failures, I've seen a couple that indicate an error message related to the certificate that accompanies the third-party Jar file that comes from th Legion of the Bouncy Castle (www.bouncycastle.org). Here is what I suggest you do to force it to download a fresh version to see if the problem goes away: 1. Fire up "javaws -viewer" again. from the "Run ..." item in the Start menu. 2. In the Java Cache Viewer where it normally shows Applications, select Show: Resources 3. That will show you all of the Jar files. 4. Click the "Name" heading on the leftmost column of that panel which will alphabetize them. 5. Scroll down until you see provider.jar (note: there may be several of them). 6. Assuming that there is more than one provider.jar listed, select the top one on the list by clicking on that row and then move your mouse to the bottom one and click again, but with the shift button held down. This will select all instances of provider.jar. 7. After they are all selected, click the Red "X" at the top center of that panel to delete all of them. 8. Then re-select the Applications item in the Show: box and select Remote Coral (SNF) from the list of applications. Note: if you want to re-add the desktop icon, click the icon that has the gray arrow pointing up to the right. Then click the green arrow which will try to run Remote Coral and should download a fresh version of provider.jar which, I know to be properly signed. Before it gets fully started, it should first download that file and then may give you a Security Warning that asks "Do you want to run this application?" (or something list that ...). You may have a "More Information" link that you can click. If you follow that, it should show you a certificate from the Legion of the Bouncy Castle. In any event, back on the Security Warning panel is a Check Box for "I accept the risk ...." that you should check and then there is a "Run" button. I'm hopeful that this will get things started for you. Good luck, John From alaeian at stanford.edu Mon Jul 9 19:32:28 2012 From: alaeian at stanford.edu (Hadiseh Alaeian) Date: Mon, 9 Jul 2012 19:32:28 -0700 (PDT) Subject: ion implanter In-Reply-To: <471097017.16069269.1341887302407.JavaMail.root@zm02.stanford.edu> Message-ID: <1438385713.16070209.1341887548997.JavaMail.root@zm02.stanford.edu> Hi all, I wonder if somebody is aware of the availability of an ion implanter in campus. I am going to ion implant some Si TEM grids. Thanks, Hadiseh From nxs4059 at stanford.edu Mon Jul 9 22:25:14 2012 From: nxs4059 at stanford.edu (Nathan Picchietti Salowitz) Date: Mon, 9 Jul 2012 22:25:14 -0700 (PDT) Subject: seeking spare/scrap 3 inch wafers In-Reply-To: <2088816249.16204083.1341897486700.JavaMail.root@zm02.stanford.edu> Message-ID: <1302929760.16206267.1341897914873.JavaMail.root@zm02.stanford.edu> Hi Folks, Does anybody have a few spare/scrap 3 inch wafers I could buy/have? Doping & orientation are not important. I am just going to use them to support my work through a plasma etch... The back side of my work will be temporarily bonded to them, so even if they have had some limited processing they may be ok... Thanks, Nate From mbaran at stanford.edu Tue Jul 10 15:56:49 2012 From: mbaran at stanford.edu (Maureen Baran) Date: Tue, 10 Jul 2012 15:56:49 -0700 (PDT) Subject: Glasses Found in the Gowning Room - Please Claim Message-ID: <00ff01cd5eef$478e8690$d6ab93b0$@stanford.edu> Dear Labmembers, If you are missing a pair of glasses and the last time you saw them were in the Gowning room - they are now sitting on my desk. please come and claim them at my cubicle #41. Maureen -------------- next part -------------- An HTML attachment was scrubbed... URL: From popomoo at stanford.edu Sat Jul 14 11:32:10 2012 From: popomoo at stanford.edu (Sangmoo Jeong) Date: Sat, 14 Jul 2012 11:32:10 -0700 (PDT) Subject: Liquid spills around the emergency shower near the entrance door in the clean room. In-Reply-To: <1998234089.26527975.1342288860422.JavaMail.root@zm02.stanford.edu> Message-ID: <1967515993.26557389.1342290730793.JavaMail.root@zm02.stanford.edu> Good morning, labmembers When I came to the clean room around 10am today, I found that there were several liquid spills around the emergency shower near the entrance door. Because the yellow cover was untied and all the liquid spills were right below and near the shower, someone might use it last night. I assumed that the liquid was water, but just in case, I wiped them with the yellow absorbent sheets and put them on the yellow hazard waste bag. Because I didn't have any clear idea what it was, I wrote down 'suspicious liquid' on the waste tag. I don't think we need any yellow warning chains or tapes around the place, and it looks normal now. I hope it solves this issue. Have a good weekend. Best Sangmoo From vrinda at stanford.edu Sun Jul 15 23:28:45 2012 From: vrinda at stanford.edu (Vrinda Thareja) Date: Sun, 15 Jul 2012 23:28:45 -0700 Subject: Etching nano-holes in metal? Message-ID: Hey labmembers, Has anyone etched *nano* grooves/holes/slit structures ~ 1um by 500nm in * metal* using any of the etching tools (MRC etcher etc. ) in SNF? I plan to pattern such small trenches in silver and then etch them using MRC etcher. It would be extremely useful to know if at all it is possible to etch metal from such small structures. thanks, -- ~Vrinda Vrinda Thareja Ph.D. Candidate Brongersma Group Department of Materials Science and Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From mustafeez27 at stanford.edu Tue Jul 17 11:05:14 2012 From: mustafeez27 at stanford.edu (Waqas Mustafeez) Date: Tue, 17 Jul 2012 11:05:14 -0700 Subject: Oral Exam Announcement: Waqas Mustafeez Message-ID: <3E03DAF7D69045BABBD273FF72D31779@WaqasPC> From: Student Services Sent: Monday, July 16, 2012 10:17 AM To: ee-students at lists.stanford.edu Subject: [ee-doctorate] Oral Exam Announcement: Waqas Mustafeez Abstract Waqas Mustafeez Date and time: 2PM (1:45PM Refreshments) Friday, 20th July 2012 Location: CISX Auditorum Advisor: Alberto Salleo Silicon Nanocrystals, Dust to Gold: Material, Devices and Synthesis Over the past half century silicon has become a dominant material for electronics but it has remained a very poor optical material. Bandwidth limitations in electronics are currently being seen as a problem. A similar situation to what happened on the long haul transport where we switched from the copper pair to optical fiber communication, may occur at the chip scale through integration of cheap on-chip optical devices. We consider two ways forward for silicon to remain a relevant material for lightwave communication in this era despite challenges posed by the indirect gap and free carrier absorption. In specific, we look at silicon nanocrystals (Si-NC) as a light emitting material to show progress in turning this indirect gap material into an efficient emitter. First we show through a highly sensitive optical absorption spectroscopy technique (photothermal deflection spectroscopy) that the negative effective mass electron states in Si-NC shift down in energy thereby reducing the energy gap at the direct transition. This effect is responsible for low amounts of visible range emission reported in small crystals; as opposed to the emission from band gap minima at the X valley attributed with majority of the total emission. Thus we confirm through a direct measurement the minima in density of states at the ? valley from splitting of the negative and positive effective mass states. We compare the shift in a few of these states with a model for quantum confinement in the nanocrystals surrounded by oxide using a simple parabolic potential well model. We then show how resonant nanocavities should be optimized for low gain broad emitters like Si-NC. These cavities offer reduced mode volumes at the cost of quality factors such that "bad emitters" like Si-NC may couple with the cavity and ultimately offer a higher likelihood of observing Purcell enhancement. FDTD simulations show Q factors above 10^3 and mode volumes below 1(l/n)^3 in silicon rich oxide, which has a refractive index of only 1.7. Finally we show a novel technique to make Si-NCs only on selected areas of the wafer: we direct-write tracks of silicon nanocrystals using a ps UV laser. It is possible to obtain 4 orders of magnitude throughput increase using this process as an alternative to oven annealing while also making localized nanocrystal precipitation a possibility. The tracks show emission enhancement over bare silicon rich oxide films and emission intensity comparable to that observed in conventionally-processed Si-NCs. We study variations in emission spectra, nanocluster phase and film stress across these tracks showing that ultimate limitation in throughput is film densification leading to compressive stress on the clusters that increases interfacial defects leading to emission quenching. -------------------------------------------------------------------------------- -- EE students mailing list ee-students at lists.stanford.edu https://mailman.stanford.edu/mailman/listinfo/ee-students -------------------------------------------------------------------------------- _______________________________________________ ee-doctorate mailing list ee-doctorate at lists.stanford.edu https://mailman.stanford.edu/mailman/listinfo/ee-doctorate -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwb2005 at stanford.edu Fri Jul 20 16:07:38 2012 From: jwb2005 at stanford.edu (John Bumgarner) Date: Fri, 20 Jul 2012 16:07:38 -0700 Subject: Introduction of Brett Huff and Michelle Rincon Message-ID: <5009E4BA.7060005@stanford.edu> Dear Lab members: We have added two staff this summer to support the lab: Mr. Brett Huff and Dr. Michelle Rincon.They sit in the same office at 144 Allen. Michelle is a Process Development Engineer and her first areas of responsibility will be ALD and CMP.While Dr. J Provine is still here for us to consult with, Michelle will be gradually taking over ownership of the tools, processes and training for the 3 existing ALDs and helping with the start-up of the next 2.She will also be slowly taking ownership of the CMP tool from Dr. Ed Myers, who also will still be around to support the tool& processes with his expert input.She is a part of the Renovation 2 team that will be replacing our wet benches over the next 3 years. Michelle's background includes 9 years at Intel/Numonyx (the Intel/ST Flash Memory spin-off) where she focused on process development primarily for flash memory down to the 45nm node. She developed batch and single wafer cleans and transferred them to high volume manufacturing sites within the US, Europe, and Asia. Most recently, Michelle spent a couple of years at a start-up focused on using nano materials to make lithium ion battery components. Her educational background is in Chemical Engineering with her PhD from Penn State and her BS from Northwestern. Brettis now the SNF Cleanroom Manager and his position involves three main priorities: safety, process tool availability and cleanroom micro-contamination. Brett is also chairing our more formalized Change Control Board (CCB)/Spec Matcommittee, meeting every Friday. Elmer, Gary, Ted and Jim H., are all now supervised by Brett is his position to insure the cleanroom and the process tools stay safely operational. Brett served 21.5 years at Intel. The first 7 years were spent in process module development for PECVD thin films applications. The next 7 years were spent doing process integration, primarily mid section/contact modules and back end dielectrics and polish. Brett moved to Intel Capital for 3 years where he worked to integrate a highly reflective Al layer into an existing Intel Cu technology for the purpose of selective projection displays. His final years were spent in Q&R working on yield issues and change control procedures. Brett comes to SNF from 2 years of fab management at SRI International in Menlo Park.He holds an Engineering BS from the University of Minnesota. Brett's extension is x4-0847 and Michelle's is x5-0307.Feel free to drop by and introduce yourself to either or both in the offices or in the fab.And please make them feel welcome coming to Stanford. Regards, John Bumgarner Operations Director SNF -------------- next part -------------- An HTML attachment was scrubbed... URL: From su1 at stanford.edu Fri Jul 20 16:25:36 2012 From: su1 at stanford.edu (Suhas Kumar) Date: Fri, 20 Jul 2012 16:25:36 -0700 Subject: Need Si wafer pieces, ASAP Message-ID: Hi All, We quickly need some pieces (5-7mm) of: Si (111), doped with resistivity smaller than 10 milliOhm-cm (the lower the better). We would like to have BOTH, p-plus and n-plus doped, but either one would be a good start. If you have small pieces to spare, or if you know a source for us to quickly get hold of, please let me know. Thank you! suhas -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Tue Jul 24 08:35:02 2012 From: shott at stanford.edu (John Shott) Date: Tue, 24 Jul 2012 08:35:02 -0700 Subject: Disk usage ... Message-ID: <500EC0A6.1060707@stanford.edu> SNF Lab Members: We are, once again, nearly out of disk space. Yesterday, we were so close to that limit that our computers were responding slowly. In fact, I received several reports that "Coral was not working ..." Coral was 100% functional and available. You can help by cleaning up unused files. Here is hte list of folks that are using more than 100 MB of space on our machine in decreasing order of usage listed in kilobytes. While SNF staff have more cause to have significant disk usage, I'm hopeful that everyone will look at their own usage and clean up where appropriate. If you want to look at more details of your own usage, you can issue the command: du -sk * | more This will list the size of each file or directory in kilobytes. If one of your directories is large, you can enter it with 'cd some_directory' and repeat the above command. In that way you should be able to find your biggest files and determine if you need to store them on this machine. In the meantime, I will be looking at the annual "wiping" of directories for people who have not been active in SNF for some time. Thanks for your consideration .... here is the list. John 1785905 jwc 1463301 bchui 605636 lichenkolo 556427 pnataraj 536540 mtan 470665 cchen86 452643 chen0622 434553 popomoo 434455 mdickey 431054 jperez 395105 vossough 380529 gunjim 361154 khoang 357350 mcvittie 357302 kosarb 355191 eenriquez 338853 mvikram 337839 lyjiao 333085 naiqian 330231 maurice 314096 cmfaulkn 313348 romana 301852 cbellew 273499 dkozak 273188 mislam 268227 ywidjaja 264686 chongxie 264017 faridz 258374 megrubbs 257547 calarrudo 250718 zpatel 249501 trejo10 246276 insun 243524 ntayebi 242393 eata 234815 hopcroft 229468 alsune 223553 oisaadat 221802 gyama 220069 kokab 212676 svo 209474 lrweiss 205018 rparsa 201297 king 201032 dxu 199017 liangjl 198148 junil 196863 renshen 195717 takuyan 192855 haiwei 192356 mrlin 192146 daesung 188845 ocakkaya 183330 jtsai 182552 rostam 181368 hrleebh 180755 wanki 180282 arion 179974 joem 178602 ybkim 178459 ryw 175583 sipark 174586 me342e 174522 asanders4 172073 sghanbari 169835 clu 169733 sarahb4671 169687 marklee 169673 me342d 169478 ofidaner 168796 eward 168556 ee410d 168516 axiu 168281 ghyrn 168237 jnhagemeier 166899 altug 165993 gth 165177 narii 163917 ytcheng 163264 mcherry 161971 dasgupta 161021 pponce 160209 fpurkl 160207 wslee 159864 cmcg 159693 jiehuang 158621 gerke 157730 dongrip 157516 jasonlin 156708 me342a 156151 cursive 156061 dalyx 155963 johana 155672 yoonjin 155421 sdogbe 155222 dwnam 154191 jennyhu 152802 jacain 152729 junjun 152164 me342b 152118 jfoster 151912 jsnapp 151892 haniff 150667 lindaw 150049 djwong 149908 tester 149271 cbaxter 148741 jhaydon 148326 aeonia 146869 clee58 146053 zzp 144153 ajamo 143822 jtaylor 142276 mtang 141956 kghadiri 141850 ludwig 141553 kavehm 141031 waqasm 139525 xzhuan1 139298 dgunning 139252 alexneu 138751 ericp 138590 srikantv 137451 dongl 136404 malekos 135831 dniemann 135079 cechang 133366 nharjee 132469 zeyuan 132468 xuanwu 131255 jackson 129923 pbrink 129460 masaharu 129028 ebeh 128750 kimsangb 128685 ahazeghi 128662 rrick 127034 kcbalram 126472 spaik1 126167 ysohn 125342 levi 125322 jcdoll 124254 barlian 123864 vilanova 123120 iwjung 122960 wangss 122614 mnakamura 122493 carini 122479 rhenn 122113 oliversw 122030 okilic 121449 elibol 120950 zeost 120884 ginel 120535 rshyam 119843 takane 119445 damodei 119381 sclaussen 119186 fungus 118982 kattsai 118769 grupp 117862 bclee79 117762 zguo 117264 mcp 116883 aditya 116617 mlacour 116555 fatihs 116523 ylinn 115522 yongli 114926 maryamzm 114902 skoh 114864 fanzeng 114683 yiyang 114405 lwchang 114404 dfulgencio 114376 grahamab 114353 mbendernagel 114238 tomada 113533 fanpy 112466 evander 112370 latta 112350 karthikv 111979 yinliu 111960 bdai 111956 jeh0513 111915 lennonl 111569 kupnik 111558 uli 111393 nppatil 110763 mihirt 110757 vijayn 110665 flannery 110613 yoneoka 110210 eperalta 109248 alexxu 109116 cduchat 108586 tazryu78 108496 laurahughes 107625 patlu 107231 whlee 106856 taotang 106839 edfei 106826 biyang 106567 chovic99 106289 npapte 105702 tberg 105449 krivoire 105223 dton 105048 vishal 104612 tholme 104584 shuluc 104298 mattm3 103873 mandysin 103856 ylyang 103849 yhngchen 103574 joongsun 102600 hazeghi 102499 mferrier 102173 jaehlee 101891 amoini 101829 anu 101814 chienyuc 101274 vijayp 101184 ycjun From jprovine at stanford.edu Tue Jul 24 09:14:13 2012 From: jprovine at stanford.edu (J Provine) Date: Tue, 24 Jul 2012 09:14:13 -0700 Subject: Disk usage ... In-Reply-To: <500EC0A6.1060707@stanford.edu> References: <500EC0A6.1060707@stanford.edu> Message-ID: i know the following to not be active members of the lab: 223553 oisaadat 209474 lrweiss 205018 rparsa 174586 me342e 169673 me342d 166899 altug 156708 me342a 152164 me342b 124254 barlian 123120 iwjung 122479 rhenn 118982 kattsai 114926 maryamzm 111569 kupnik 110613 yoneoka i am sure there are many more inactive or abandoned accounts that i'm not aware on this list. j On Tue, Jul 24, 2012 at 8:35 AM, John Shott wrote: > SNF Lab Members: > > We are, once again, nearly out of disk space. Yesterday, we were so close > to that limit that our computers were responding slowly. In fact, I > received several reports that "Coral was not working ..." Coral was 100% > functional and available. > > You can help by cleaning up unused files. > > Here is hte list of folks that are using more than 100 MB of space on our > machine in decreasing order of usage listed in kilobytes. While SNF staff > have more cause to have significant disk usage, I'm hopeful that everyone > will look at their own usage and clean up where appropriate. > > If you want to look at more details of your own usage, you can issue the > command: > > du -sk * | more > > This will list the size of each file or directory in kilobytes. If one of > your directories is large, you can enter it with 'cd some_directory' and > repeat the above command. In that way you should be able to find your > biggest files and determine if you need to store them on this machine. > > In the meantime, I will be looking at the annual "wiping" of directories > for people who have not been active in SNF for some time. > > Thanks for your consideration .... here is the list. > > John > > 1785905 jwc > 1463301 bchui > 605636 lichenkolo > 556427 pnataraj > 536540 mtan > 470665 cchen86 > 452643 chen0622 > 434553 popomoo > 434455 mdickey > 431054 jperez > 395105 vossough > 380529 gunjim > 361154 khoang > 357350 mcvittie > 357302 kosarb > 355191 eenriquez > 338853 mvikram > 337839 lyjiao > 333085 naiqian > 330231 maurice > 314096 cmfaulkn > 313348 romana > 301852 cbellew > 273499 dkozak > 273188 mislam > 268227 ywidjaja > 264686 chongxie > 264017 faridz > 258374 megrubbs > 257547 calarrudo > 250718 zpatel > 249501 trejo10 > 246276 insun > 243524 ntayebi > 242393 eata > 234815 hopcroft > 229468 alsune > 223553 oisaadat > 221802 gyama > 220069 kokab > 212676 svo > 209474 lrweiss > 205018 rparsa > 201297 king > 201032 dxu > 199017 liangjl > 198148 junil > 196863 renshen > 195717 takuyan > 192855 haiwei > 192356 mrlin > 192146 daesung > 188845 ocakkaya > 183330 jtsai > 182552 rostam > 181368 hrleebh > 180755 wanki > 180282 arion > 179974 joem > 178602 ybkim > 178459 ryw > 175583 sipark > 174586 me342e > 174522 asanders4 > 172073 sghanbari > 169835 clu > 169733 sarahb4671 > 169687 marklee > 169673 me342d > 169478 ofidaner > 168796 eward > 168556 ee410d > 168516 axiu > 168281 ghyrn > 168237 jnhagemeier > 166899 altug > 165993 gth > 165177 narii > 163917 ytcheng > 163264 mcherry > 161971 dasgupta > 161021 pponce > 160209 fpurkl > 160207 wslee > 159864 cmcg > 159693 jiehuang > 158621 gerke > 157730 dongrip > 157516 jasonlin > 156708 me342a > 156151 cursive > 156061 dalyx > 155963 johana > 155672 yoonjin > 155421 sdogbe > 155222 dwnam > 154191 jennyhu > 152802 jacain > 152729 junjun > 152164 me342b > 152118 jfoster > 151912 jsnapp > 151892 haniff > 150667 lindaw > 150049 djwong > 149908 tester > 149271 cbaxter > 148741 jhaydon > 148326 aeonia > 146869 clee58 > 146053 zzp > 144153 ajamo > 143822 jtaylor > 142276 mtang > 141956 kghadiri > 141850 ludwig > 141553 kavehm > 141031 waqasm > 139525 xzhuan1 > 139298 dgunning > 139252 alexneu > 138751 ericp > 138590 srikantv > 137451 dongl > 136404 malekos > 135831 dniemann > 135079 cechang > 133366 nharjee > 132469 zeyuan > 132468 xuanwu > 131255 jackson > 129923 pbrink > 129460 masaharu > 129028 ebeh > 128750 kimsangb > 128685 ahazeghi > 128662 rrick > 127034 kcbalram > 126472 spaik1 > 126167 ysohn > 125342 levi > 125322 jcdoll > 124254 barlian > 123864 vilanova > 123120 iwjung > 122960 wangss > 122614 mnakamura > 122493 carini > 122479 rhenn > 122113 oliversw > 122030 okilic > 121449 elibol > 120950 zeost > 120884 ginel > 120535 rshyam > 119843 takane > 119445 damodei > 119381 sclaussen > 119186 fungus > 118982 kattsai > 118769 grupp > 117862 bclee79 > 117762 zguo > 117264 mcp > 116883 aditya > 116617 mlacour > 116555 fatihs > 116523 ylinn > 115522 yongli > 114926 maryamzm > 114902 skoh > 114864 fanzeng > 114683 yiyang > 114405 lwchang > 114404 dfulgencio > 114376 grahamab > 114353 mbendernagel > 114238 tomada > 113533 fanpy > 112466 evander > 112370 latta > 112350 karthikv > 111979 yinliu > 111960 bdai > 111956 jeh0513 > 111915 lennonl > 111569 kupnik > 111558 uli > 111393 nppatil > 110763 mihirt > 110757 vijayn > 110665 flannery > 110613 yoneoka > 110210 eperalta > 109248 alexxu > 109116 cduchat > 108586 tazryu78 > 108496 laurahughes > 107625 patlu > 107231 whlee > 106856 taotang > 106839 edfei > 106826 biyang > 106567 chovic99 > 106289 npapte > 105702 tberg > 105449 krivoire > 105223 dton > 105048 vishal > 104612 tholme > 104584 shuluc > 104298 mattm3 > 103873 mandysin > 103856 ylyang > 103849 yhngchen > 103574 joongsun > 102600 hazeghi > 102499 mferrier > 102173 jaehlee > 101891 amoini > 101829 anu > 101814 chienyuc > 101274 vijayp > 101184 ycjun > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mcherry1 at stanford.edu Tue Jul 24 10:09:59 2012 From: mcherry1 at stanford.edu (Matt Cherry) Date: Tue, 24 Jul 2012 10:09:59 -0700 Subject: <100um Thick Si Wafers? Message-ID: Hello Labmembers, I am hoping that someone has a spare Si wafer of 100um or less thickness. In fact, just a piece ~1cm sq. would do. Barring that, does anyone have a favorite vendor for such wafers? Thanks for your help, Matt Cherry -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Tue Jul 24 11:32:29 2012 From: shott at stanford.edu (John Shott) Date: Tue, 24 Jul 2012 11:32:29 -0700 Subject: Disk usage ... an update ... Message-ID: <500EEA3D.9040800@stanford.edu> SNF Lab Members: Some of you have sent me email stating: Person X is gone ... While I appreciate your willingness to help, we try to be somewhat systematic about removing lab members. Here is what we do (and we do this annually): If someone shows no Coral activity (equipment use, reservations, inventory check outs, subscriptions, etc) for the last 3 years truncated to the start of the year (that is 01-JAN-2009), we then dump all of their files to tertiary storage, deactivate them, remove them from things like mailing lists, etc. I am doing this housekeeping (with a series of scripts) as I type this. It takes a number of hours to complete ... You might think that 3 years is too long a period to wait, but you'd be surprised by the number of folks that come back either working for a company, as a faculty member or post-doc at another institution, even after they have "left". In any event, this is a more convenient way of "cleaning up" in bulk and gives us fewer places to look for old records if/when someone shows back up after more than 3 years looking for something. Some of you have also written to say "I don't keep any files" on the Coral computers. If you don't, but you still show up on the over-100MB list, that usually means that you have a big Firefox (or Mozilla) cache or have downloaded things like videos. For example, some of you likely have local stored copies of various SNF training videos (say, delrin_tweezers.wmv, sgv.wmv, etc). Since those files are always available at our web site, you don't need a local copy and deleting those local copies of Windows Media Viewer files helps everyone. Thanks for you continued support, John From jimkruger at yahoo.com Tue Jul 24 12:12:20 2012 From: jimkruger at yahoo.com (jim kruger) Date: Tue, 24 Jul 2012 12:12:20 -0700 (PDT) Subject: <100um Thick Si Wafers? In-Reply-To: References: Message-ID: <1343157140.13796.YahooMailNeo@web161001.mail.bf1.yahoo.com> Virgina Semiconductors http://www.virginiasemi.com/?cont_uid=18 I have never dealt with them. good luck,? jim ________________________________ From: Matt Cherry To: labmembers at snf.stanford.edu Sent: Tuesday, July 24, 2012 10:09 AM Subject: <100um Thick Si Wafers? Hello Labmembers, I am hoping that someone has a spare Si wafer of 100um or less thickness.? In fact, just a piece ~1cm sq. would do.? Barring that, does anyone have a favorite vendor for such wafers? Thanks for your help, Matt Cherry -------------- next part -------------- An HTML attachment was scrubbed... URL: From minchieh at stanford.edu Tue Jul 24 12:24:30 2012 From: minchieh at stanford.edu (Min-Chieh Ho) Date: Tue, 24 Jul 2012 12:24:30 -0700 (PDT) Subject: DRIE process vendors In-Reply-To: <1547501057.27913154.1343157429038.JavaMail.root@zm03.stanford.edu> Message-ID: <1430200335.27919064.1343157870149.JavaMail.root@zm03.stanford.edu> Dear Labmembers, I am looking for some DRIE etcher that can etch large area, shallow circles (e.g. 2000 um radius, 10 um deep) with good within-wafer uniformity. (< 5% depth variation) -- I don't quite care about the sidewall profile or other issues, but just etch rate control and uniformity. Unfortunately, our STS1 or STS2 wasn't able to give me good enough uniformity. If you know any vendors providing the DRIE etch service, or other facilities having a good DRIE etcher that I can possibly have access to, can you please let me know? I'll probably start with sending out some test wafers (or go there personally) to etch and then check out the uniformity. Thank you~ Min-Chieh -- -------------------------------------------------- Min-Chieh Ho Ginzton Lab Stanford University Ph.D. Candidate, Dept. of Electrical Engineering minchieh at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mbaran at stanford.edu Tue Jul 24 13:53:13 2012 From: mbaran at stanford.edu (Maureen Baran) Date: Tue, 24 Jul 2012 13:53:13 -0700 (PDT) Subject: FW: Attached Image In-Reply-To: <20120724131701.0001.CanonTxNo.0047@CIS-147-COPIER.STANFORD.EDU> References: <20120724131701.0001.CanonTxNo.0047@CIS-147-COPIER.STANFORD.EDU> Message-ID: <00a301cd69de$568a68e0$039f3aa0$@stanford.edu> Dear Mary, Attached is the latest form that I've been handing out to Staff Lab members that qualify and want to take advantage of the EHS benefit. This form was sent to me by John Clark of Essilor Laboratories. Are we now working with 3M and not Essilor? Can you please let me know when this all occurred? Also, should I now direct all qualified Staff Lab members to: http://www.stanford.edu/dept/EHS/prod/mainrencon/occhealth/PrescriptionSaf etyGlasses.html instead of handing out the form like I've been doing for the last 9 years? Lastly, in the last 3 or 4 months I've had at least 4 or 5 qualified SNF Staff employees update their prescription lab glasses so what happens to the difference between $200.00 and $140.00? Thank you for your time in this matter. Sincerely, Maureen From: cis-147-copier at eemail.stanford.edu [mailto:cis-147-copier at eemail.stanford.edu] Sent: Tuesday, July 24, 2012 1:17 PM To: mbaran at stanford.edu Subject: Attached Image -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: 0047_001.pdf Type: application/pdf Size: 82282 bytes Desc: not available URL: From maurice at stanford.edu Tue Jul 24 14:46:06 2012 From: maurice at stanford.edu (Maurice M Stevens) Date: Tue, 24 Jul 2012 14:46:06 -0700 (PDT) Subject: Today's lab evacuation Message-ID: <701595322.28450194.1343166366952.JavaMail.root@zm03.stanford.edu> Hi Members, We had a POCl alarm and Silane alarm go off in separate two exhausted cabinets at ~2:05pm today above the Tylan LPCVD furnaces. The sensors in the breathing zone did not detect anything. We are waiting for the levels in those two cabinets to return to normally before letting users re-enter the lab. We expect to let everyone back in at 3:00pm. The Tylans 5, 6, 7, 8, 9, 10, 11, will all be shutdown while we investigate the cause of the alarms. We will send an update when we have more information. From zbeiley at stanford.edu Tue Jul 24 15:05:25 2012 From: zbeiley at stanford.edu (Zach Beiley) Date: Tue, 24 Jul 2012 15:05:25 -0700 Subject: ITO deposition Message-ID: Labmembers, Does anyone know of a facility on campus that can deposit Indium Tin Oxide (ITO) or other transparent conducting oxides (e.g. Aluminum Zinc Oxide, Indium Zinc Oxide)? Or is there a contractor that other users have dealt with and would recommend? Thank you. Zach -- Zach Beiley Materials Science and Engineering Stanford University 476 Lomita Mall McCullough 201 Stanford, CA 94305 (805) 451-0089 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Tue Jul 24 15:49:48 2012 From: maurice at stanford.edu (maurice stevens) Date: Tue, 24 Jul 2012 15:49:48 -0700 Subject: Lab now open Message-ID: <500F268C.8030602@stanford.edu> Hi Members, We had a POCl alarm and Silane alarm go off in separate two exhausted cabinets at 2:03pm today above the Tylan LPCVD furnaces. The sensors in the breathing zone did not detect anything. We waited until the two cabinets were out of alarm status before letting users back into the lab. The lab was closed from 2:02 until 3:10. The Tylans 5, 6, 7, 8, 9, 10, 11, will all be shutdown while we investigate the cause of the alarms. We will send another update once we have more information. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From mtang at stanford.edu Wed Jul 25 21:18:37 2012 From: mtang at stanford.edu (Mary Tang) Date: Wed, 25 Jul 2012 21:18:37 -0700 Subject: Process Clinic Thursday at 10:30 (Note time change!) Message-ID: <5010C51D.202@stanford.edu> Dear labmembers -- Just a reminder of the Process Clinic on Thursday, Jul. 26. It will start at 10:30 am and will be held in the cube area near Maureen's office (and right next to Jim Kruger's desk, giving us a better chance of picking his brain.) Please note the time change to 10:30. Bring your process flows, device sketches, mask layouts, photos of your devices, and data. Staff will be on hand (and maybe Jim too?) to brainstorm answers to your questions. Your SNF staff From maxms at stanford.edu Wed Jul 25 23:30:20 2012 From: maxms at stanford.edu (Max Marcel Shulaker) Date: Wed, 25 Jul 2012 23:30:20 -0700 (PDT) Subject: wafer bonding experience In-Reply-To: <24029676.35537694.1343284147655.JavaMail.root@zm03.stanford.edu> Message-ID: <1354858848.35537817.1343284220106.JavaMail.root@zm03.stanford.edu> Hey everyone, I was wondering if anyone had bonded PECVD oxide to either another oxide, glass, quartz (or any other insulator). Any help would be appreciated, Max From haiwei at stanford.edu Wed Jul 25 23:34:29 2012 From: haiwei at stanford.edu (Hai Wei) Date: Wed, 25 Jul 2012 23:34:29 -0700 (PDT) Subject: PM alignment marks In-Reply-To: <1908377161.32702784.1343284246461.JavaMail.root@zm06.stanford.edu> Message-ID: <1461660810.32703118.1343284469073.JavaMail.root@zm06.stanford.edu> Hi Labmembers and ASML users, I am creating a mask for ASML using PM alignment marks. Does anyone know if it matters when the PM mark is close to the design patterns? I will have a design about 200um away from the PM marks. If you can comment on the feasibility and potential issues, that would be really appreciated. Thanks a lot! Hai From hyyuan36 at stanford.edu Thu Jul 26 10:23:47 2012 From: hyyuan36 at stanford.edu (Hongyuan Yuan) Date: Thu, 26 Jul 2012 10:23:47 -0700 (PDT) Subject: need silicon oxide Message-ID: <978932390.33005943.1343323427596.JavaMail.root@zm06.stanford.edu> Dear group members, currently, I am very much in need of high quality silicon oxide on highly doped silicon(both p and n type would work), with any thickness ranging from 300nm to 800nm. if you by chance have some that can lend, please contact me ASAP. it would be of great help! thanks in advance:) best, Hongyuan From jprovine at stanford.edu Sat Jul 28 20:33:40 2012 From: jprovine at stanford.edu (J Provine) Date: Sat, 28 Jul 2012 20:33:40 -0700 Subject: a request Message-ID: hello labmembers, i would like to have your help in locating someone or something. sometime today (saturday july 28th) between 2pm and 8pm someone stole two 4" single wafer trays of mine from the table by the fiji. they had my name and the name of hongyuan (a student working with me) on them. they were empty waiting for the wafers being processed to fill them up when complete. now a 4" single wafer tray isn't that expensive or a big deal. stealing is. so: 1) if you took it, put it back and never ever treat your fellow labmembers with such disrespect again. 2) if you know who took it, please ask them more nicely to return it and encourage them to start acting like a grownup. or let me know and i'll utilize this teaching moment to hopefully improve a misguided mind in our lab. 3) if you know nothing of this incident, but are concerned about the community and continued and improving excellence of our lab, do not let shallow poor behavior exist should you run across anything similar in your time in this lab. i mildly desire to know who did this and wasted my time, BUT i strongly desire such a betrayal of the trust within the SNF community never to be perpetrated again. and if you need a 4" single wafer carrier, just ask me like the responsible adult i assumed you were. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From edmyers at stanford.edu Tue Jul 31 09:49:27 2012 From: edmyers at stanford.edu (Ed Myers) Date: Tue, 31 Jul 2012 09:49:27 -0700 Subject: TGO Testing Monday Aug. 6th Message-ID: <50180C97.1040501@stanford.edu> All, We are tentatively scheduled for the County to come in Monday afternoon (1pm-5pm) and test our Toxic Gas Monitoring changes associated with the new etcher installation. The county will want to see live gas challenges, which will lead to shutdown of our hazardous gases. This will be very dissruptive since it will effect the gas supplies all the etcher, epi, LPVCD, PECVD, etc. Once I receive confirmation as to the time of the visit, I will make blocking reservations on all the tools which will be effected. While I know how disruptive this is, it is also very good news for those waiting for the new etcher to come on line. We must pass this inspection before we can turn on the process gases. Once we can turn on the process gases, the process engineers can come in and do the final start-up and qualification on the four new etchers. Regards, The SNF Staff