Etching nano-holes in metal?
vrinda at stanford.edu
Sun Jul 15 23:28:45 PDT 2012
Has anyone etched *nano* grooves/holes/slit structures ~ 1um by 500nm in *
metal* using any of the etching tools (MRC etcher etc. ) in SNF? I plan to
pattern such small trenches in silver and then etch them using MRC etcher.
It would be extremely useful to know if at all it is possible to etch metal
from such small structures.
Department of Materials Science and Engineering
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the labmembers