Etching nano-holes in metal?

Vrinda Thareja vrinda at
Sun Jul 15 23:28:45 PDT 2012

Hey labmembers,

Has anyone etched *nano* grooves/holes/slit structures ~ 1um by 500nm in *
metal* using any of the etching tools (MRC etcher etc. ) in SNF? I plan to
pattern such small trenches in silver and then etch them using MRC etcher.
It would be extremely useful to know if at all it is possible to etch metal
from such small structures.


Vrinda Thareja
Ph.D. Candidate
Brongersma Group
Department of Materials Science and Engineering
Stanford University
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