Ru deposition

Scott Lee wslee at stanford.edu
Tue Jun 5 14:46:22 PDT 2012


Hi all,

I need to deposit about 20-50nm Ru ideally by ALD or CVD but sputtered Ru
could also work. Does anyone have a source for depositing Ru or have
experience with a company who deposits a wide array of thin films?

Thanks,
Scott
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