Ru deposition

Betty Young bayoung at stanford.edu
Wed Jun 6 10:28:54 PDT 2012


Hi Scott,
I've used this company for interesting material needs.
http://lebowcompany.com/

They are amazing.
Good luck, Betty Young (Physics)

----- Original Message -----
From: "Scott Lee" <wslee at stanford.edu>
To: labmembers at snf.stanford.edu
Sent: Tuesday, June 5, 2012 2:46:22 PM
Subject: Ru deposition

Hi all, 


I need to deposit about 20-50nm Ru ideally by ALD or CVD but sputtered Ru could also work. Does anyone have a source for depositing Ru or have experience with a company who deposits a wide array of thin films? 


Thanks, 
Scott 



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