Ru deposition

Betty Young bayoung at
Wed Jun 6 10:28:54 PDT 2012

Hi Scott,
I've used this company for interesting material needs.

They are amazing.
Good luck, Betty Young (Physics)

----- Original Message -----
From: "Scott Lee" <wslee at>
To: labmembers at
Sent: Tuesday, June 5, 2012 2:46:22 PM
Subject: Ru deposition

Hi all, 

I need to deposit about 20-50nm Ru ideally by ALD or CVD but sputtered Ru could also work. Does anyone have a source for depositing Ru or have experience with a company who deposits a wide array of thin films? 


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