H2O2 etch photoresist rate

Zhangll.ime zhangll.ime at gmail.com
Thu Jun 7 11:29:43 PDT 2012


Hi all,

Does anyone know the etch rate of photoresist (for example, 3612) in H2O2 ?

Thanks a lot!

Sincerely yours,
Liangliang

-------------------------
Liangliang Zhang
Ph. D candidate,
Electrical Engineering,
Stanford University



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