Selective dry etching of SiN from silicon

Donguk Nam dwnam83 at
Mon Jun 11 23:07:53 PDT 2012

Dear Labmembers,

Does anyone have any experience in selective dry etching of SiN from silicon? I have been using CHF3/O2 in Drytek4 but the etch selectivity is not high enough for my process.

Please let me know if anyone has some experience.

Best regards,

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