Does anyone know how to remove or de-cross-link PMMA that has been UV crosslinked?

Roger Fabian Pease pease at cis.stanford.edu
Wed Jun 13 18:34:22 PDT 2012


Oxygen plasma or Ozone and a hot plate were used many years ago. May still be.
FP

Sent from my iPhone

On Jun 13, 2012, at 5:22 PM, Katie Chang <kgc at stanford.edu> wrote:

> Hello SNF users,
> 
> I was wondering if anyone had experience in removing crosslinked PMMA from a wafer (or in de-crosslinking it). We have some devices on which we accidentally forgot to use blue tape to cover up the contact pads when we were spinning our passivating PMMA layer. Then, to compound the issue, we gave them to a bio group that decided to sterilize them by pounding them with UV light for 8 hours.
> 
> Now it seems nothing will get it off!  We tried to selectively scrub off the PMMA from just the contact pads, which failed. Then, we tried to just remove all of the PMMA from the whole wafer, which failed. We've tried soaking and sonicating in acetone, PG remover, chloroform, chlorobenzene, and several other things, which all failed. Does anyone have any suggestions?
> 
> Thanks for your help!
> 
> --Katie



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