Does anyone know how to remove or de-cross-link PMMA that has been UV crosslinked?

Paul Park yspark at
Wed Jun 13 19:01:25 PDT 2012

There is PMMA remover available.

Check out

Good luck!


On Wed, Jun 13, 2012 at 6:34 PM, Roger Fabian Pease
<pease at>wrote:

> Oxygen plasma or Ozone and a hot plate were used many years ago. May still
> be.
> FP
> Sent from my iPhone
> On Jun 13, 2012, at 5:22 PM, Katie Chang <kgc at> wrote:
> > Hello SNF users,
> >
> > I was wondering if anyone had experience in removing crosslinked PMMA
> from a wafer (or in de-crosslinking it). We have some devices on which we
> accidentally forgot to use blue tape to cover up the contact pads when we
> were spinning our passivating PMMA layer. Then, to compound the issue, we
> gave them to a bio group that decided to sterilize them by pounding them
> with UV light for 8 hours.
> >
> > Now it seems nothing will get it off!  We tried to selectively scrub off
> the PMMA from just the contact pads, which failed. Then, we tried to just
> remove all of the PMMA from the whole wafer, which failed. We've tried
> soaking and sonicating in acetone, PG remover, chloroform, chlorobenzene,
> and several other things, which all failed. Does anyone have any
> suggestions?
> >
> > Thanks for your help!
> >
> > --Katie
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