Re: Re: Does anyone know how to remove or de-cross-link PMMA that hasbeen UV crosslinked?
kangning at stanford.edu
Wed Jun 13 22:44:36 PDT 2012
I didn't know they are also offering silicone solvents & removers. Cool.
发件人： Paul Park
发送时间： 2012-06-13 18:01:43
收件人： Roger Fabian Pease
抄送： Katie Chang; labmembers at snf.stanford.edu
主题： Re: Does anyone know how to remove or de-cross-link PMMA that hasbeen UV crosslinked?
There is PMMA remover available.
Check out http://www.dynaloy.com/
On Wed, Jun 13, 2012 at 6:34 PM, Roger Fabian Pease <pease at cis.stanford.edu> wrote:
Oxygen plasma or Ozone and a hot plate were used many years ago. May still be.
Sent from my iPhone
On Jun 13, 2012, at 5:22 PM, Katie Chang <kgc at stanford.edu> wrote:
> Hello SNF users,
> I was wondering if anyone had experience in removing crosslinked PMMA from a wafer (or in de-crosslinking it). We have some devices on which we accidentally forgot to use blue tape to cover up the contact pads when we were spinning our passivating PMMA layer. Then, to compound the issue, we gave them to a bio group that decided to sterilize them by pounding them with UV light for 8 hours.
> Now it seems nothing will get it off! We tried to selectively scrub off the PMMA from just the contact pads, which failed. Then, we tried to just remove all of the PMMA from the whole wafer, which failed. We've tried soaking and sonicating in acetone, PG remover, chloroform, chlorobenzene, and several other things, which all failed. Does anyone have any suggestions?
> Thanks for your help!
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