Bake condition before ion implantation

Zhangll.ime zhangll.ime at gmail.com
Thu Jun 14 17:27:57 PDT 2012


Hi all,

Does anyone know the bake conditions for AZ3612 before 20keV 4e15 ion-implantation?

I was using 115C 30min (on hot plate) last night but found wrinkles on my photoresist.

Any suggestion is appreciated. Thanks!

Sincerely yours,
Liangliang

-------------------------
Liangliang Zhang
Ph. D candidate,
Electrical Engineering,
Stanford University


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