Schedules Litho facilities work on 6/18
Gary J Sosa
gsosa at stanford.edu
Fri Jun 15 12:56:44 PDT 2012
Greetings Lab-members ..
On Monday, June 18th, the facilities group will be servicing the transfer fan T-6 which provides conditioned air to Aisle L-100. This is the Headway, Laurell and Blue-M oven aisle in the Litho area. The repair work is scheduled to start at 6:30am and be completed by 10:30am. During this time period, there will be no temperature or humidity control in the L-100 aisle. We strongly recommend that you refrain from processing your work in this aisle during this time to avoid any unstable or unpredictable results. If you choose to do process work at this time, please take a test wafer if possible. Litho staff members will be available on Monday to address any questions or concerns that you may have. Thank you in advance for your patience and understanding.
The Litho Team
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