Partial Lab Shutdown, Saturday, 6/23/12

Mary Tang mtang at
Fri Jun 22 15:24:57 PDT 2012

Dear labmembers --

The scrubber exhaust system requires unexpected maintenance.  This will 
take place from 7:30-2 pm tomorrow, Saturday, June 23.  Most tools in 
the lab require scrubber exhaust and so will not be available during 
this time.  Wet benches will be shutdown earlier, to allow for bath 
draining in advance of the scrubber shutdown.  The few tools remaining 
that do not require scrubber exhaust will remain in operation (see list 
below).  Please also be aware that scrubber maintenance often results in 
strong, unpleasant, sulfurous odors in the vicinity of this building - 
you may want to avoid coming in.  We deeply apologize for the 
inconvenience this causes in your scheduling.

Your SNF Staff

Tools OK to run:  Raith, sem4160, svgcoat, svgdev, exposure/align tools, 
metal deposition tools.

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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