Question: Etch rate of Unannealed 400degC LTO with 6:1 BOE wet etch

Kyunglok Kim kyunglok at stanford.edu
Thu Oct 18 16:30:17 PDT 2012


Dear labmembers,

I'd like to use 6:1 BOE to etch a 1um thick LTO deposited at 400degC.
If 6:1 BOE etch rate is too aggressive, I also have a plan to use 50:1 HF
instead of it.
Would you please let me know the average etch rate of both of them?
I really appreciate your help!

Best,
Kyunglok Kim
PhD Candidate
Electrical Engineering
Stanford University
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