Question: Etch rate of Unannealed 400degC LTO with 6:1 BOE wet etch

J Provine jprovine at stanford.edu
Thu Oct 18 16:36:56 PDT 2012


you will find this webpage a useful reference:
http://snf.stanford.edu/Process/WetProcessing/WetER1.html

On Thu, Oct 18, 2012 at 4:30 PM, Kyunglok Kim <kyunglok at stanford.edu> wrote:

> Dear labmembers,
>
> I'd like to use 6:1 BOE to etch a 1um thick LTO deposited at 400degC.
> If 6:1 BOE etch rate is too aggressive, I also have a plan to use 50:1 HF
> instead of it.
> Would you please let me know the average etch rate of both of them?
> I really appreciate your help!
>
> Best,
> Kyunglok Kim
> PhD Candidate
> Electrical Engineering
> Stanford University
>
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