Ni etching?

Azadeh Moini amoini at
Fri Oct 19 15:13:11 PDT 2012

Hi labmembers,

I have some wafers with 40nm Ni on top of 500nm Al. I'd like to etch the
40nm Ni layer while preserving the 500nm Al. I'm open to either wet or dry
etching. Does anyone have any experience etching Ni? I'd like the
selectivity between Ni and Al to be as high as possible, but it doesn't
need to be super high. Any suggestions/experience would be appreciated.

Thanks for your help!

Azadeh Moini
Stanford University
Department of Electrical Engineering
amoini at
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