Etching Low stress silicon nitride

Liam O'Faolain ofaolain at stanford.edu
Tue Oct 23 16:32:04 PDT 2012


Dear Labmembers,

Which etching system and recipe gives the highest selectivity between 
low stress silicon nitride and resist?

Thank you,
Liam

-- 
Dr. Liam O'Faolain
Ginzton Laboratory, Nano Building
348 Via Pueblo Mall, Stanford CA 94305, USA.




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