Etching Low stress silicon nitride

Liam O'Faolain ofaolain at
Tue Oct 23 16:32:04 PDT 2012

Dear Labmembers,

Which etching system and recipe gives the highest selectivity between 
low stress silicon nitride and resist?

Thank you,

Dr. Liam O'Faolain
Ginzton Laboratory, Nano Building
348 Via Pueblo Mall, Stanford CA 94305, USA.

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