Laminar hood problem in SNF Litho Update
maurice at stanford.edu
Thu Oct 25 14:30:15 PDT 2012
Facilities is reporting that the transfer fan above the ASML/Yes Oven may be down overnight. The other fan in that aisle is back up and running at 100%.
If you need to work on sensitive processes in that area you may want to wait until the fan in that area is back up.
We will send another update once we have more information.
On Oct 25, 2012, at 12:00 PM, Mary Tang <mtang at stanford.edu> wrote:
> Dear labmembers --
> We've just been informed that two air transfer fans have failed so that there is no laminar flow in part of the Litho area. Facilities is working on a temporary repair which they expect will be done around 2 pm today. The laminar flow hoods affected are the ones that serve L101 aisle (Karlsuss1/2, lithosolv, ASML) and L100 (ovens, YES, headway2.)
> The litho area will remain open. However, we advise that if you have any defect sensitive processes, you may want to delay work until the laminar flow is back on later today.
> Please also note that when the laminar flow comes back on later today, it will be at 100% capacity rather than scaled back to 2/3 as it runs in the rest of the lab and the L102 aisle (SVGcoat, SVGdev, EValign systems). This will no doubt be louder and may result in odd air flow patterns in the litho area. Facilities has ordered parts for repair, but do not yet have an estimate as to when the parts are due in and repairs can take place. We will update you as soon as we hear.
> Thanks for your attention --
> Your SNF Staff
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> Paul G. Allen Room 136, Mail Code 4070
> Stanford, CA 94305
> mtang at stanford.edu
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