Al2O3 etching

Max Marcel Shulaker maxms at stanford.edu
Tue Oct 30 13:25:48 PDT 2012


Hello everyone,
Hope it's a happy tuesday for you.  I was wondering if someone had experience dry etching Al2O3 from a fiji ALD chamber?  I have some recipes, but am wondering what other people use and what etch rates they get, etc.  Right now, I use BCL3/Cl2 on pquest, but am worried about the chloride and nasty residues left behind...
Thanks!
-Max



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