[labmembers] borrow ProTEK B3 for long time KOH etch

Helen Qiushi Ran qran at stanford.edu
Thu Feb 14 18:02:06 PST 2013

Dear labmembers, 
My process need a through-wafer KOH etch. From my experience, the unprotected front surface will be attacked. I am wondering if some of the groups have ProTEK B3, and I can borrow a little. I only need it for one wafer. We would like to pay for the portion. Thanks in advance. 

Helen Qiushi Ran 
Department of Electrical Engineering 
Stanford University, Stanford, CA 94305. 
Mobile: +1-650-796-1439 
Email: qran at stanford.edu 

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