From anolley at snf.stanford.edu Tue Dec 12 01:23:27 2000 From: anolley at snf.stanford.edu (anolley at snf.stanford.edu) Date: Dec 12, 2000 1:23:27 PM Subject: Shutdown lampoly: Message-ID: load arm not rotating, 1 wf in ld ch only. From booth at snf.stanford.edu Tue Dec 12 02:09:17 2000 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 12, 2000 2:09:17 PM Subject: Shutdown lampoly: Message-ID: reinitialized wafer transport. removed all dummy wafers from system.