From true at snf.stanford.edu  Fri Nov  3 12:38:22 2000
From: true at snf.stanford.edu (true at snf.stanford.edu)
Date: Nov 3, 2000 12:38:22 AM
Subject: Shutdown lampoly: loader arm stuck
Message-ID: <mailman.40.1356282338.4111.lampoly-pcs@snf.stanford.edu>

I was just running one wafer and the arm never picked it up so I just took it carefully out of the cassette.



From booth at snf.stanford.edu  Fri Nov  3 06:29:10 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Nov 3, 2000 6:29:10 AM
Subject: Shutdown Clear lampoly: initialized wafer transport.
Message-ID: <mailman.41.1356282338.4111.lampoly-pcs@snf.stanford.edu>