From booth at snf.stanford.edu Wed Apr 4 10:44:16 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 4, 2001 10:44:16 AM Subject: Shutdown lampoly 2001-04-04 10:44:15: Need to install new bottle of BCl3. Message-ID: From booth at snf.stanford.edu Wed Apr 4 10:52:14 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 4, 2001 10:52:14 AM Subject: Shutdown lampoly 2001-04-04 10:44:15: Need to install new bottle of BCl3. Message-ID: From mcvittie at cis.Stanford.EDU Wed Apr 4 10:48:02 2001 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Wed, 4 Apr 2001 10:48:02 -0700 (PDT) Subject: Shutdown lampoly 2001-04-04 10:44:15: Need to install new bottle of BCl3. In-Reply-To: <200104041752.f34HqKn08424@leland2.Stanford.EDU> Message-ID: Len, THe Lam etcher does not use BCl3. Jim From ychliu at snf.stanford.edu Thu Apr 12 06:08:46 2001 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Apr 12, 2001 6:08:46 PM Subject: Shutdown lampoly 2001-04-12 18:08:45: wafer stuck Message-ID: From cbaxter at snf.stanford.edu Thu Apr 12 09:20:37 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 12, 2001 9:20:37 PM Subject: Shutdown lampoly 2001-04-12 18:08:45: wafer stuck Message-ID: removed wafer and wet cleaned chamber. wafer that was stuck inside the chamber has thick resist build up on the edge of the wafer. From booth at snf.stanford.edu Mon Apr 16 08:51:31 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 16, 2001 8:51:31 AM Subject: Shutdown lampoly 2001-04-16 08:51:30: Shutdown - operator screen is dead Message-ID: From booth at snf.stanford.edu Mon Apr 16 01:40:54 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 16, 2001 1:40:54 PM Subject: Shutdown lampoly 2001-04-16 08:51:30: Shutdown - operator screen is dead Message-ID: cleared. Fuse for 120VAC supply to CRT was blown. Schematics call for 8Amp fuse - found blown 4Amp fuse had been installed. From greene at snf.stanford.edu Tue Apr 17 10:59:41 2001 From: greene at snf.stanford.edu (greene at snf.stanford.edu) Date: Apr 17, 2001 10:59:41 AM Subject: Problem lampoly 2001-04-17 10:59:40: Severe particle generation problem Message-ID: Ran several dummy wafers this morning. Noticed huge number of particles on the wafers after etching. From mcvittie at snf.stanford.edu Tue Apr 17 07:08:14 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Apr 17, 2001 7:08:14 PM Subject: Shutdown lampoly 2001-04-17 19:08:13: Still has Particle Problem After Wet Clean Message-ID: Brian Green and I tried to bring up the chamber after the wet clean. We followed the procedure from Lam. Particles showed up on the first wafer before doing a plasma clean. After running the plasma clean on 6 wafers (3 min each), we run one a std poly etch (recipe #1). The particle level was better but still unacceptable. For the particle measurements, we used the black lamp in the litho area and dark field on a microscope. Both methods showed lots and lots of particles. At this point, start over and do another wet clean and vacuum the chamber. We will follow the Lam again after that. Sorry for all the problems, Jim From mcvittie at snf.stanford.edu Wed Apr 18 06:49:07 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Apr 18, 2001 6:49:07 PM Subject: Shutdown lampoly 2001-04-17 19:08:13: Still has Particle Problem After Wet Clean Message-ID: We found lots of dust/prticles in both the entrance and load locks. Len did acomplete system clean. Brian Green is presently conditioning the chamber. On the 1st wafer he found some particles. but they are much much fewer than last night. When he finishes he will send out a note saying what the particle status is. Jim From booth at snf.stanford.edu Tue Apr 24 10:46:01 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 24, 2001 10:46:01 AM Subject: Shutdown lampoly 2001-04-24 10:45:59: Pump being sent out for repair Message-ID: