Shutdown lampoly 2001-04-17 19:08:13: Still has Particle Problem After Wet Clean

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Wed Apr 18 06:49:07 PDT 2001


We found lots of dust/prticles in both the entrance and load 
locks. Len did acomplete system clean. Brian Green is  
presently
conditioning the chamber. On the 1st wafer he found some 
particles. but they are much much fewer than last night. When 
he finishes he will send out a note saying what the particle 
status is.    Jim  




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