Shutdown lampoly 2001-04-17 19:08:13: Still has Particle Problem After Wet Clean

[mcvittie at snf.stanford.edu]

We found lots of dust/prticles in both the entrance and load 
locks. Len did acomplete system clean. Brian Green is  
presently
conditioning the chamber. On the 1st wafer he found some 
particles. but they are much much fewer than last night. When 
he finishes he will send out a note saying what the particle 
status is.    Jim