From cbaxter at snf.stanford.edu  Thu Aug  9 05:31:17 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 9, 2001 5:31:17 PM
Subject: Shutdown lampoly 2001-08-09 17:31:16: need to change filter
Message-ID: <mailman.114.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Aug  9 05:31:23 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 9, 2001 5:31:23 PM
Subject: Shutdown lampoly 2001-08-09 17:31:23: 
Message-ID: <mailman.115.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Aug  9 07:15:58 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 9, 2001 7:15:58 PM
Subject: Shutdown lampoly 2001-08-09 17:31:23: 
Message-ID: <mailman.116.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Aug  9 07:16:39 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 9, 2001 7:16:39 PM
Subject: Shutdown lampoly 2001-08-09 17:31:16: need to change filter
Message-ID: <mailman.117.1356282339.4111.lampoly-pcs@snf.stanford.edu>

flush heat exchanger and changed both lower filters.



From ychliu at snf.stanford.edu  Wed Aug 15 03:01:33 2001
From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu)
Date: Aug 15, 2001 3:01:33 PM
Subject: Shutdown lampoly 2001-08-15 15:01:32: robot arm stuck
Message-ID: <mailman.118.1356282339.4111.lampoly-pcs@snf.stanford.edu>

The previous user didn't put the receiving cassette properly and I started my run without checking it carefully. When the first dummy wafer came out, it gave a "exit cassette sensed full" message and stuck there.



From cbaxter at snf.stanford.edu  Wed Aug 15 05:00:03 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 15, 2001 5:00:03 PM
Subject: Shutdown lampoly 2001-08-15 15:01:32: robot arm stuck
Message-ID: <mailman.119.1356282339.4111.lampoly-pcs@snf.stanford.edu>

home robot and unload wafer from chamber manually



From booth at snf.stanford.edu  Mon Aug 20 09:47:30 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Aug 20, 2001 9:47:30 AM
Subject: Shutdown lampoly 2001-08-20 09:47:29: Software fault - cannot run.
Message-ID: <mailman.120.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon Aug 20 08:53:52 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Aug 20, 2001 8:53:52 PM
Subject: Shutdown lampoly 2001-08-20 09:47:29: Software fault - cannot run.
Message-ID: <mailman.121.1356282339.4111.lampoly-pcs@snf.stanford.edu>

got some infromation for Lam tech support. reseated
cpu and adio boards and tool reboot fine.



From rcrane at snf.stanford.edu  Sat Aug 25 07:47:08 2001
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Aug 25, 2001 7:47:08 AM
Subject: Shutdown lampoly 2001-08-25 07:47:07: facility
Message-ID: <mailman.122.1356282339.4111.lampoly-pcs@snf.stanford.edu>




From rcrane at snf.stanford.edu  Sat Aug 25 04:28:47 2001
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Aug 25, 2001 4:28:47 PM
Subject: Shutdown lampoly 2001-08-25 07:47:07: facility
Message-ID: <mailman.123.1356282339.4111.lampoly-pcs@snf.stanford.edu>

exhaust is up