Shutdown lampoly 2001-08-15 15:01:32: robot arm stuck

ychliu at snf.stanford.edu ychliu at snf.stanford.edu
Wed Aug 15 03:01:33 PDT 2001


The previous user didn't put the receiving cassette properly and I started my run without checking it carefully. When the first dummy wafer came out, it gave a "exit cassette sensed full" message and stuck there.




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